Modelling of Microfabrication Systems

Modelling of Microfabrication Systems
артикул: COM9783540002529USED
$31.00
Доставка з: Канада
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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
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