20 microns interdigitated electrodes ide quartz glass gold microelectrode mems medical optical chemical sensor biosensor chip

1. the substrate: quartz glass. the size of the substrate is 5mm x 8mm x 0.7mm. 2. the conductor layer structure: cr/au, the thickness are 30nm and 100nm respectively. 3. line space: 20um; line width: 20um; finger length: 2100um; number of interdigitate pairs: 50(100 fingers).