1 micrometer interdigitated electrodes ide silicon substrate mems medical chemical sensor biosensor chip

1. the substrate: p-type monocrystalline silicon with 300nm thickness of sio2 on the surface of the silicon wafer. the size of the substrate is 5mm x 8mm x 0.52mm. the conductor layer structure: cr/au, the thickness are 30nm and 100nm respectively. 2. line space: 1um; line width: 5um; finger length: 1800um; number of interdigitate pairs : 100(200 fingers). 3. large pads, so operation is easy. this product can be used as core part of biological, medical and optical sensors.