Технологии субмикронных структур микроэлектроники
Description
Рассмотрены и обобщены результаты исследований и разработок в области технологии и оборудования для производства и диагностики субмикронных структур полупроводниковой микроэлектроники. Предназначена для инженерно-технических работников предприятий электронной и других отраслей промышленности, специалистов научно-исследовательских институтов, аспирантов, магистрантов и студентов старших курсов технических вузов.
Technical Details
| age: | 0 |
| author: | Коллектив авторов |
| genres_list: | 5312,5671,5763,55135,99335,115905,124043 |
| ISBN: | 978-985-08-2298-7 |
| lang: | ru |
| litres_isbn: | 978-5-04-158515-0 |
| publisher: | Издательский дом “Белорусская наука” |
| Type: | book |
| year: | 2018 |
| Форматы: |
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