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Atomic Layer Deposition

Atomic Layer Deposition

sku: 34443056

20,860.00 руб.+11%

23,153.29 руб.

Shipping from: Russia

Description

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

Technical Details

age:	0
author:	Marja-Leena K??ri?inen
genres_list:	5671
ISBN:	9781118747421
lang:	en
publisher:	John Wiley & Sons Limited
Type:	book
Форматы:	PDF

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